Azote Trifluoride (NF3) Gazi Yera
Amakuru Yibanze
| URUBANZA | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
Ibi bikoresho ni ibihe?
Azote trifluoride (NF3) ni gaze itagira ibara kandi idafite impumuro nziza mubushyuhe bwicyumba hamwe nigitutu cyikirere. Irashobora gutwarwa nigitutu giciriritse. NF3 ihagaze neza mubihe bisanzwe kandi ntishobora kubora byoroshye. Ariko, irashobora kubora mugihe ihuye nubushyuhe bwinshi cyangwa imbere ya catalizator zimwe. NF3 ifite ubushyuhe bukabije ku isi (GWP) iyo irekuwe mu kirere.
Ni he wakoresha ibi bikoresho?
Umukozi ushinzwe isuku mu nganda za elegitoroniki: NF3 ikoreshwa cyane nkigikoresho cyo gukora isuku kugirango ikureho umwanda usigaye, nka okiside, hejuru y’amashanyarazi, ibyuma byerekana plasma (PDPs), nibindi bikoresho bya elegitoroniki. Irashobora guhanagura neza iyi sura itayangije.
Gazi ya Etching muguhimba semiconductor: NF3 ikoreshwa nka gaze ya ething mugikorwa cyo gukora semiconductor. Ifite akamaro cyane mugutobora dioxyde ya silicon (SiO2) na nitride ya silicon (Si3N4), nibikoresho bisanzwe bikoreshwa muguhimba imiyoboro ihuriweho.
Umusaruro wibintu byinshi bya fluor bifite isuku: NF3 nisoko yingirakamaro ya fluor kugirango ikore ibintu bitandukanye birimo fluor. Ikoreshwa nkibibanziriza gukora fluoropolymers, fluorocarbone, hamwe nimiti yihariye.
Igisekuru cya plasma muburyo bugaragara bwerekana: NF3 ikoreshwa hamwe nizindi myuka kugirango ikore plasma mugukora ibice byerekana neza, nka flux ya kristu yerekana (LCDs) na PDPs. Plasma ningirakamaro muburyo bwo kubika no gutobora mugihe cyo guhimba.
Menya ko porogaramu n'amabwiriza yihariye yo gukoresha ibi bikoresho / ibicuruzwa bishobora gutandukana mubihugu, inganda n'intego. Buri gihe ukurikize amabwiriza yumutekano kandi ubaze impuguke mbere yo gukoresha ibi bikoresho / ibicuruzwa mubisabwa byose.
Ibicuruzwa bifitanye isano
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Carbone Tetrafluoride (CF4) Gazi Yera
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Umwuka wa Hexafluoride (SF6) Umwuka mwinshi
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Silane (SiH4) Gazi Yera
